TY  - JOUR
AB  - Purpose– The purpose of this paper is to discuss the numerical modelling of 3D structure of micro‐electro‐mechanical systems (MEMS) accelerometers. The general idea being discussed is the method of levitation force reduction, as the main source of incorrect mathematical model of comb drive structure.Design/methodology/approach– Accelerometers design is a highly interdisciplinary area and, therefore, different methods and tools have to be exploited. Dynamic accelerometer behaviour modelling has been performed by use of a new object‐oriented model (NOOM), based on complex computer field and mechanical models.Findings– The paper describes methods of levitation force reduction in electrostatic comb drive structures based on electrostatic structural models and finite elements method.Research limitations/implications– In the present work, the authors limit themselves to the electrostatic energy domains.Practical implications– Both, mechanical and electric models of accelerometers give the input data for defining the object‐oriented model, based on Matlab‐Simulink platform, fulfilling the general demand of dynamic behaviour simulation of comb drive structure. The proposed by authors methodology could give valuable contribution to MEMS design methodology.Originality/value– A new methodology has been successfully applied to calculation of levitation force in different geometries of comb drive. This methodology could be useful for multidisciplinary MEMS systems.
VL  - 28
IS  - 3
SN  - 0332-1649
DO  - 10.1108/03321640910940864
UR  - https://doi.org/10.1108/03321640910940864
AU  - Wiak Sławomir
AU  - Smółka Krzysztof
ED  - Andrezej Demenko
PY  - 2009
Y1  - 2009/01/01
TI  - Numerical modeling of 3‐D comb drive electrostatic accelerometers structure (method of levitation force reduction)
T2  - COMPEL - The international journal for computation and mathematics in electrical and electronic engineering
PB  - Emerald Group Publishing Limited
SP  - 593
EP  - 602
Y2  - 2024/04/19
ER  -