Numerical modeling of 3‐D comb drive electrostatic accelerometers structure (method of levitation force reduction)

Sławomir Wiak (Institute of Mechatronics and Information Systems, Technical University of Lodz, Lodz, Poland)
Krzysztof Smółka (Institute of Mechatronics and Information Systems, Technical University of Lodz, Lodz, Poland)

Abstract

Purpose

The purpose of this paper is to discuss the numerical modelling of 3D structure of micro‐electro‐mechanical systems (MEMS) accelerometers. The general idea being discussed is the method of levitation force reduction, as the main source of incorrect mathematical model of comb drive structure.

Design/methodology/approach

Accelerometers design is a highly interdisciplinary area and, therefore, different methods and tools have to be exploited. Dynamic accelerometer behaviour modelling has been performed by use of a new object‐oriented model (NOOM), based on complex computer field and mechanical models.

Findings

The paper describes methods of levitation force reduction in electrostatic comb drive structures based on electrostatic structural models and finite elements method.

Research limitations/implications

In the present work, the authors limit themselves to the electrostatic energy domains.

Practical implications

Both, mechanical and electric models of accelerometers give the input data for defining the object‐oriented model, based on Matlab‐Simulink platform, fulfilling the general demand of dynamic behaviour simulation of comb drive structure. The proposed by authors methodology could give valuable contribution to MEMS design methodology.

Originality/value

A new methodology has been successfully applied to calculation of levitation force in different geometries of comb drive. This methodology could be useful for multidisciplinary MEMS systems.

Keywords

Citation

Wiak, S. and Smółka, K. (2009), "Numerical modeling of 3‐D comb drive electrostatic accelerometers structure (method of levitation force reduction)", COMPEL - The international journal for computation and mathematics in electrical and electronic engineering, Vol. 28 No. 3, pp. 593-602. https://doi.org/10.1108/03321640910940864

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Publisher

:

Emerald Group Publishing Limited

Copyright © 2009, Emerald Group Publishing Limited

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