TY  - JOUR
AB  - Induction heating is widely used in the industry due to high efficiency, precise control, rapid heating and low pollution properties. To process a semiconductor of high quality, uniform heating is necessary, but it is not easy to heat uniformly by using the conventional induction heating equipment. For this purpose, the zone control induction heating equipment is jointly developed with Mitsui Engineering Shipbuilding Co., Ltd. In this paper, the optimization of current in each coil is carried out using the finite element method and the optimization method in order to obtain a uniform eddy current loss distribution on graphite.
VL  - 23
IS  - 4
SN  - 0332-1649
DO  - 10.1108/03321640410553472
UR  - https://doi.org/10.1108/03321640410553472
AU  - Okamoto Yoshifumi
AU  - Imai Toshio
AU  - Miyagi Daisuke
AU  - Takahashi Norio
AU  - Ozaki Kazuhiro
AU  - Ono Hiroshi
AU  - Uchida Naoki
PY  - 2004
Y1  - 2004/01/01
TI  - Optimal design of induction heating equipment for high‐speed processing of a semiconductor
T2  - COMPEL - The international journal for computation and mathematics in electrical and electronic engineering
PB  - Emerald Group Publishing Limited
SP  - 1045
EP  - 1052
Y2  - 2024/04/24
ER  -