TY - JOUR AB - With the increasing trends towards fineline circuitry, contamination has become a major cause of defects. This paper outlines the techniques used in conducting a Contamination Audit and in generating a Contamination Matrix, which is a map of the types of contamination and their relative levels within a facility.Using the Contamination Matrix contamination control measures can be targetted in the most effective manner to achieve yield improvements. VL - 22 IS - 3 SN - 0305-6120 DO - 10.1108/03056129610799994 UR - https://doi.org/10.1108/03056129610799994 AU - Hamilton S. PY - 1996 Y1 - 1996/01/01 TI - The Contamination Audit ‐ A Vital Tool For Yield Improvement T2 - Circuit World PB - MCB UP Ltd SP - 23 EP - 25 Y2 - 2024/03/29 ER -