TY  - JOUR
AB  - This paper describes some aspects of micro sensors developed as part of the micromachine project in Japan. This national R&D project, industrial science and technology frontier program “Micromachine technology”, was inaugurated in 1991 as a ten‐year project. The R&D goal is to establish technologies to realize micromachines for the following practical applications; maintenance and repair of power plant facilities; miniaturization of manufacturing facilities; medical diagnosis and treatment. As a result, various types of micro sensors have been successfully developed.
VL  - 19
IS  - 1
SN  - 0260-2288
DO  - 10.1108/02602289910255568
UR  - https://doi.org/10.1108/02602289910255568
AU  - Tsuruta Kazuhiro
AU  - Mikuriya Yoshikazu
AU  - Ishikawa Yuichi
PY  - 1999
Y1  - 1999/01/01
TI  - Micro sensor developments in Japan
T2  - Sensor Review
PB  - MCB UP Ltd
SP  - 37
EP  - 42
Y2  - 2024/09/19
ER  -