Micro sensor developments in Japan

Abstract

This paper describes some aspects of micro sensors developed as part of the micromachine project in Japan. This national R&D project, industrial science and technology frontier program “Micromachine technology”, was inaugurated in 1991 as a ten‐year project. The R&D goal is to establish technologies to realize micromachines for the following practical applications; maintenance and repair of power plant facilities; miniaturization of manufacturing facilities; medical diagnosis and treatment. As a result, various types of micro sensors have been successfully developed.

Citation

Tsuruta, K., Mikuriya, Y. and Ishikawa, Y. (1999), "Micro sensor developments in Japan", Sensor Review, Vol. 19 No. 1, pp. 37-42. https://doi.org/10.1108/02602289910255568