This paper describes some aspects of micro sensors developed as part of the micromachine project in Japan. This national R&D project, industrial science and technology frontier program “Micromachine technology”, was inaugurated in 1991 as a ten‐year project. The R&D goal is to establish technologies to realize micromachines for the following practical applications; maintenance and repair of power plant facilities; miniaturization of manufacturing facilities; medical diagnosis and treatment. As a result, various types of micro sensors have been successfully developed.
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