A brief description is given of chromatic optical fibre sensing with particular reference to the monitoring of semiconductor plasma processing. Via this particular example it is shown how such chromatic sensing forms a convenient basis for interconnecting the sensing function of fibre based devices with modern signal processing methodologies enabling intelligent monitoring systems to be assembled. The generic nature of chromatic sensing is illustrated by reference to a number of sensors for addressing different measureands and the route for extending the methodology for the intelligent monitoring of high voltage circuit breakers is indicated as an example of the wider application of the approach.
Russell, P.C., Spencer, J.W. and Jones, G.R. (1998), "Optical fibre sensing for intelligent monitoring using chromatic methodologies", Sensor Review, Vol. 18 No. 1, pp. 44-48. https://doi.org/10.1108/02602289810198310Download as .RIS
MCB UP Ltd
Copyright © 1998, MCB UP Limited