Fabrication technology for microengineering
R.A. Lawes
(Central Microstructure Facility, Rutherford Appleton Laboratory, Chilton, Didcot, UK)
224
Abstract
Reviews some of the more important technologies used for fabricating microcomponents and systems – bulk silicon micromachining, surface micromachining and LIGA, a process for forming deep microstructures by lithography, electroforming and moulding. Discusses the relative merits of using synchroton, electron beam and excimer laser irradiation. Gives a comb actuator and an electrostatic motor as examples of micromachined components.
Keywords
Citation
Lawes, R.A. (1996), "Fabrication technology for microengineering", Sensor Review, Vol. 16 No. 2, pp. 16-22. https://doi.org/10.1108/02602289610115566
Publisher
:MCB UP Ltd
Copyright © 1996, MCB UP Limited