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Fabrication technology for microengineering

R.A. Lawes (Central Microstructure Facility, Rutherford Appleton Laboratory, Chilton, Didcot, UK)

Sensor Review

ISSN: 0260-2288

Article publication date: 1 June 1996

Abstract

Reviews some of the more important technologies used for fabricating microcomponents and systems – bulk silicon micromachining, surface micromachining and LIGA, a process for forming deep microstructures by lithography, electroforming and moulding. Discusses the relative merits of using synchroton, electron beam and excimer laser irradiation. Gives a comb actuator and an electrostatic motor as examples of micromachined components.

Keywords

Citation

Lawes, R.A. (1996), "Fabrication technology for microengineering", Sensor Review, Vol. 16 No. 2, pp. 16-22. https://doi.org/10.1108/02602289610115566

Publisher

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MCB UP Ltd

Copyright © 1996, MCB UP Limited