To read this content please select one of the options below:

MEMS ultra low leak detection methods: a review

Suzanne Millar (MIcroSystems Engineering Centre, School of Engineering and Physical Sciences, Heriot‐Watt University, Edinburgh, UK)
Marc Desmulliez (MIcroSystems Engineering Centre, School of Engineering and Physical Sciences, Heriot‐Watt University, Edinburgh, UK)

Sensor Review

ISSN: 0260-2288

Article publication date: 11 September 2009

831

Abstract

Purpose

The purpose of this paper is to review traditional hermeticity test methods when applied to typical micro‐electro‐mechanical systems (MEMS) cavity volumes and to propose potential solutions.

Design/methodology/approach

Standards for traditional testing have been applied to typical MEMS cavity volumes and the resulting issues of range and sensitivity discussed. In situ test structures have been designed and fabricated with access to the internal cavities to allow characterisation of the structures as a function of pressure.

Findings

The ultra low leak rates necessary to guarantee hermeticity of MEMS cannot be measured using traditional methods. Optical test methods are possible although in situ test structures currently provide the greatest sensitivity. A portfolio of test techniques is required to allow accurate hermeticity testing of MEMS.

Research limitations/implications

This paper provides a starting point for further investigation into several methods of MEMS hermeticity testing.

Originality/value

This paper provides a review of the limitations of traditional testing and proposals for future testing as the trend towards smaller volume packaging continues.

Keywords

Citation

Millar, S. and Desmulliez, M. (2009), "MEMS ultra low leak detection methods: a review", Sensor Review, Vol. 29 No. 4, pp. 339-344. https://doi.org/10.1108/02602280910986584

Publisher

:

Emerald Group Publishing Limited

Copyright © 2009, Company

Related articles