Micromachined high sensitivity thermal inclinometer

Abstract

Purpose

This document presents the study of a one‐dimensional thermal inclinometer based on free convection.

Design/methodology/approach

A micromachined one is used. The sensitivity of the sensor is optimized in a close chamber containing CO2 gas under pressure.

Findings

By using this type of sensor in a close chamber containing CO2 gas under pressure, the sensitivity increase and the response time decrease when the pressure increase. High resolution will be achieved.

Research limitations/implications

High shock reliability.

Practical implications

Measuring μg acceleration.

Originality/value

Low cost production.

Citation

Johann, C., Philippe, C. and Alain, G. (2006), "Micromachined high sensitivity thermal inclinometer", Sensor Review, Vol. 26 No. 3, pp. 203-208. https://doi.org/10.1108/02602280610675483