Micromachined high sensitivity thermal inclinometer
Abstract
Purpose
This document presents the study of a one‐dimensional thermal inclinometer based on free convection.
Design/methodology/approach
A micromachined one is used. The sensitivity of the sensor is optimized in a close chamber containing CO2 gas under pressure.
Findings
By using this type of sensor in a close chamber containing CO2 gas under pressure, the sensitivity increase and the response time decrease when the pressure increase. High resolution will be achieved.
Research limitations/implications
High shock reliability.
Practical implications
Measuring μg acceleration.
Originality/value
Low cost production.
Keywords
Citation
Johann, C., Philippe, C. and Alain, G. (2006), "Micromachined high sensitivity thermal inclinometer", Sensor Review, Vol. 26 No. 3, pp. 203-208. https://doi.org/10.1108/02602280610675483
Publisher
:Emerald Group Publishing Limited
Copyright © 2006, Emerald Group Publishing Limited