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Miniature mass spectrometry: implications for monitoring of gas discharges

S. Taylor (S. Taylor is based at the Department of Electrical Engineering and Electronics, Liverpool University, Brownlow Hill, Liverpool, UK.)
J.R. Gibson (J.R. Gibson is based at the Department of Electrical Engineering and Electronics, Liverpool University, Brownlow Hill, Liverpool, UK.)
B. Srigengan (B. Srigengan is at the Department of Physics, Queens University Belfast, Belfast.)

Sensor Review

ISSN: 0260-2288

Article publication date: 1 June 2003

478

Abstract

In the last 10 years there has been an increasing trend towards miniaturisation in mass spectrometry. Miniature versions of magnetic sector, time of flight (TOF) and quadrupole mass spectrometers (QMS) have all been developed. Some of these systems use silicon microengineering technology, e.g. MEMS, to achieve the small geometries necessary, other systems use conventional engineering but on a reduced scale. The scientific advantages of miniaturisation include the ability to measure and monitor at higher vacuum pressures than hitherto (>10−2 mbar). Miniaturisation also offers advantages due to the reduced cost and resulting portable nature of the smaller instruments.

Keywords

Citation

Taylor, S., Gibson, J.R. and Srigengan, B. (2003), "Miniature mass spectrometry: implications for monitoring of gas discharges", Sensor Review, Vol. 23 No. 2, pp. 150-154. https://doi.org/10.1108/02602280310468260

Publisher

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MCB UP Ltd

Copyright © 2003, MCB UP Limited

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