New generation of humidity sensors
Stefan Christian
(production manager and sales director at Sensirion AG, Zurich, Switzerland. Tel: +41 (0) 1 306 40 00; Fax +41 (0) 1 306 40 30; E‐mail stefan.christian@sensirion.com; www.sensirion.com)
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Abstract
Describes the design, fabrication and performance of a new form of humidity sensor based on CMOS technology. The sensor incorporates analogue signal processing and serial digital communications on a single silicon chip.
Keywords
Citation
Christian, S. (2002), "New generation of humidity sensors", Sensor Review, Vol. 22 No. 4, pp. 300-302. https://doi.org/10.1108/02602280210444609
Publisher
:MCB UP Ltd
Copyright © 2002, MCB UP Limited