Micro‐module Peltier elaborated by flash technique and used as a humidity sensor

B. Sorli (Centre d’Eléctronique et de Micro‐optoéléctronique de Montpellier, Université Montpellier II, France)
A. Foucaran (Centre d’Eléctronique et de Micro‐optoéléctronique de Montpellier, Université Montpellier II, France)
A. Giani (Centre d’Eléctronique et de Micro‐optoéléctronique de Montpellier, Université Montpellier II, France)
F. Pascal‐Delannoy (Centre d’Eléctronique et de Micro‐optoéléctronique de Montpellier, Université Montpellier II, France)
A. Boyer (Centre d’Eléctronique et de Micro‐optoéléctronique de Montpellier, Université Montpellier II, France)

Sensor Review

ISSN: 0260-2288

Publication date: 1 December 2000

Abstract

In this work an original humidity sensor is described. It is based on the study of Seebeck voltage evolution during the water evaporation of a micro‐module Peltier (MMP). The measurement principle is to detect (after cooling) the small temperature decrease created when total water evaporation occurs over the MMP. All the active thin layers of the sensor are made from (Bi2Te3)0.9(Bi2Se3)0.1 (N) films and (Bi2Te3)0.25(Sb2Te3)0.75 (P) films flash evaporated. Experimental measures were performed in a climatic chamber for several values of relative humidity (50 to 90 per cent). The phenomenon (evaporation) appears after a delay time τ. This delay time is the response time of the sensor. Therefore it is possible to draw the evaporation delay time as a function of relative humidity.

Keywords

Citation

Sorli, B., Foucaran, A., Giani, A., Pascal‐Delannoy, F. and Boyer, A. (2000), "Micro‐module Peltier elaborated by flash technique and used as a humidity sensor", Sensor Review, Vol. 20 No. 4, pp. 332-336. https://doi.org/10.1108/02602280010351046

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MCB UP Ltd

Copyright © 2000, MCB UP Limited

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