Integrated microsystem for blue/ultraviolet detection

Abstract

A fully integrated sensor microsystem for blue/ultraviolet radiation detection is presented. The photosensitive part combines a blue/UV selective stripe‐shaped photodiode with a small compensation infrared photodiode. A transimpedance amplifier with 1 GΩ feedback resistor is integrated on the same silicon chip. The main features of the op amp are a low offset (<0.5mV) and fail‐safe operation. This sensor has a maximal responsivity of 150 mV/nW at λ = 420 nm, corresponding to 43 percent quantum efficiency. A ratio of the responsivities at 420 nm and 1 μm as large as 560 is achieved. The system has a noise equivalent power of 5 10^‐13 W. The 2.2 mm² microsystem is realized in a standard CMOS 0.5 μm process.

Citation

Pauchard, A., Furrer, B., Randjelovic, Z., Rochas, A., Manic, D. and Popovic, R.S. (2000), "Integrated microsystem for blue/ultraviolet detection", Sensor Review, Vol. 20 No. 1, pp. 31-35. https://doi.org/10.1108/02602280010311374