An automatic optical inspection system for measuring a microlens array with an optical interferometric microscope and genetic algorithm

Shih‐Wei Yang (Department of Electrical and Control Engineering, National Chiao Tung University, Hsinchu, Taiwan)
Chern‐Sheng Lin (Department of Automatic Control Engineering, Feng Chia University, Taichung, Taiwan)
Shir‐Kuan Lin (Department of Electrical and Control Engineering, National Chiao Tung University, Hsinchu, Taiwan)
Shu‐Hsien Fu (Department of Automatic Control Engineering, Feng Chia University, Taichung, Taiwan)
Mau‐Shiun Yeh (Chung‐Shan Institute of Science and Technology, Lung‐Tan, Taiwan)

Assembly Automation

ISSN: 0144-5154

Publication date: 15 February 2013

Abstract

Purpose

The purpose of this paper is to propose an automatic optical inspection system for measuring the surface profile of a microlens array.

Design/methodology/approach

The system set‐up was constructed according to the principle of the Fizeau interferometer. After capturing the ring interference fringe images of the microlens with a camera, the diameter, profile information and optical properties were analyzed through a microlens surface profile algorithm using innovative image pre‐processing with a precision of less than 0.09 micron.

Findings

By integrating with the genetic algorithm, the XY‐Table shortest moving path of the system is calculated to achieve the purpose of high‐speed inspection and automatic microlens array surface profile measurement.

Originality/value

The measurement results of this system were also compared with other systems, including the atomic force microscope and stylus profiler, to verify the measurement precision and accuracy of this system.

Keywords

Citation

Yang, S., Lin, C., Lin, S., Fu, S. and Yeh, M. (2013), "An automatic optical inspection system for measuring a microlens array with an optical interferometric microscope and genetic algorithm", Assembly Automation, Vol. 33 No. 1, pp. 57-67. https://doi.org/10.1108/01445151311294720

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Publisher

:

Emerald Group Publishing Limited

Copyright © 2013, Emerald Group Publishing Limited

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