The purpose of this paper is to propose an automatic optical inspection system for measuring the surface profile of a microlens array.
The system set‐up was constructed according to the principle of the Fizeau interferometer. After capturing the ring interference fringe images of the microlens with a camera, the diameter, profile information and optical properties were analyzed through a microlens surface profile algorithm using innovative image pre‐processing with a precision of less than 0.09 micron.
By integrating with the genetic algorithm, the XY‐Table shortest moving path of the system is calculated to achieve the purpose of high‐speed inspection and automatic microlens array surface profile measurement.
The measurement results of this system were also compared with other systems, including the atomic force microscope and stylus profiler, to verify the measurement precision and accuracy of this system.
Yang, S., Lin, C., Lin, S., Fu, S. and Yeh, M. (2013), "An automatic optical inspection system for measuring a microlens array with an optical interferometric microscope and genetic algorithm", Assembly Automation, Vol. 33 No. 1, pp. 57-67. https://doi.org/10.1108/01445151311294720Download as .RIS
Emerald Group Publishing Limited
Copyright © 2013, Emerald Group Publishing Limited