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Nanoscale fabrication: techniques, limitations and future prospects

Robert Bogue (Okehampton, UK)

Assembly Automation

ISSN: 0144-5154

Article publication date: 27 September 2011



This paper aims to provide an overview of the strategies and techniques being used and developed for the fabrication of nanoscale devices.


This paper discusses various nanofabrication technologies and strategies and highlights their merits and limitations. It concludes with a consideration of longer‐term possibilities.


It is shown that top‐down nanofabrication frequently uses lithographic and other techniques derived from the microtechnology industry but recent research appears to have identified a limit to its capabilities. Bottom‐up nanofabrication is less well‐developed but techniques such as molecular mechanosynthesis may offer unique capabilities in the longer‐term.


The paper provides a timely review of the rapidly developing field of nanofabrication technology.



Bogue, R. (2011), "Nanoscale fabrication: techniques, limitations and future prospects", Assembly Automation, Vol. 31 No. 4, pp. 304-308.



Emerald Group Publishing Limited

Copyright © 2011, Emerald Group Publishing Limited