A spine layout design method for semiconductor fabrication facilities containing automated material‐handling systems

Abstract

A bay configuration arranged along a central spine and served by an automated monorail material‐handling system are common designs for the layout and material‐handling system in new semiconductor wafer fabrication facilities. Investigates the facility design problem in semiconductor fabrication facilities and proposes a procedure to determine the optimal spine layout design, given a design of the material‐handling system. Explains and tests the procedure to demonstrate the use of the model for solving semiconductor facility design problems. The procedure is applicable for the important semicondutor industry as well as in other facilities that use a central spine layout configuration.

Citation

Yang, T. and Peters, B.A. (1997), "A spine layout design method for semiconductor fabrication facilities containing automated material‐handling systems", International Journal of Operations & Production Management, Vol. 17 No. 5, pp. 490-501. https://doi.org/10.1108/01443579710167212