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An industrial solution to automatic robot calibration and workpiece pose estimation for semiconductor and gene‐chip microarray fabrication

Mingjun Zhang (Life Sciences and Chemical Analysis Division at Agilent Technologies, Palo Alto, California, USA)
Weimin Tao (Brooks Automation, Mountain View, California, USA)
William Fisher (Life Sciences and Chemical Analysis Division at Agilent Technologies, Palo Alto, California, USA)
Tzyh‐Jong Tarn (Department of Electrical and Systems Engineering, Washington University, St Louis, Missouri, USA)

Industrial Robot

ISSN: 0143-991x

Article publication date: 1 March 2006

Abstract

Purpose

For semiconductor and gene‐chip microarray fabrication, robots are widely used to handle workpieces. It is critical that robots can calibrate themselves regularly and estimate workpiece pose automatically. This paper proposes an industrial method for automatic robot calibration and workpiece pose estimation.

Design/methodology/approach

The methods have been implemented using an air‐pressure sensor and a laser sensor.

Findings

Experimental results conducted in an industrial manufacturing environment show efficiency of the methods.

Originality/value

The contribution of this paper consists of an industrial solution to automatic robot calibration and workpiece pose estimation for automatic semiconductor and gene‐chip microarray fabrication.

Keywords

Citation

Zhang, M., Tao, W., Fisher, W. and Tarn, T. (2006), "An industrial solution to automatic robot calibration and workpiece pose estimation for semiconductor and gene‐chip microarray fabrication", Industrial Robot, Vol. 33 No. 2, pp. 88-96. https://doi.org/10.1108/01439910610651383

Publisher

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Emerald Group Publishing Limited

Copyright © 2006, Emerald Group Publishing Limited