An industrial solution to automatic robot calibration and workpiece pose estimation for semiconductor and gene‐chip microarray fabrication
Abstract
Purpose
For semiconductor and gene‐chip microarray fabrication, robots are widely used to handle workpieces. It is critical that robots can calibrate themselves regularly and estimate workpiece pose automatically. This paper proposes an industrial method for automatic robot calibration and workpiece pose estimation.
Design/methodology/approach
The methods have been implemented using an air‐pressure sensor and a laser sensor.
Findings
Experimental results conducted in an industrial manufacturing environment show efficiency of the methods.
Originality/value
The contribution of this paper consists of an industrial solution to automatic robot calibration and workpiece pose estimation for automatic semiconductor and gene‐chip microarray fabrication.
Keywords
Citation
Zhang, M., Tao, W., Fisher, W. and Tarn, T. (2006), "An industrial solution to automatic robot calibration and workpiece pose estimation for semiconductor and gene‐chip microarray fabrication", Industrial Robot, Vol. 33 No. 2, pp. 88-96. https://doi.org/10.1108/01439910610651383
Publisher
:Emerald Group Publishing Limited
Copyright © 2006, Emerald Group Publishing Limited